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§ Private Profile · Beaverton, OR, USA
Develops and supplies chemically reactive polishing pads and chemical solutions for abrasive-free planarization in semiconductor manufacturing.
Based in Portland, Oregon, ChEmpower develops and manufactures chemically reactive polishing pads and chemical solutions for abrasive-free planarization in semiconductor manufacturing. This technology eliminates traditional abrasives to reduce defects, improve chip yields, lower costs, and enable water recycling and metal recovery during the fabrication process. The company recently introduced its Chakra polishing product for copper interconnects, which is currently undergoing pilot testing with leading memory and logic semiconductor companies across the United States and Asia. To commercialize these solutions, the enterprise has raised $24.1 million in total venture capital, including an $18.7 million Series A round in April 2025 backed by Intel Capital, M Ventures, Rhapsody Venture Partners, Pangaea Ventures, and In-Q-Tel. ChEmpower was founded in 2019 by chief executive officer Sudhanshu Misra and chief technology officer Professor SV Babu of Clarkson University.
ChEmpower has raised $19.0M across 1 funding round.
ChEmpower has raised $19.0M in total across 1 funding round.
ChEmpower is a semiconductor materials company developing abrasive-free polishing pads and chemical solutions for planarization in chip manufacturing. It serves leading semiconductor fabs globally, solving key pain points in traditional chemical mechanical planarization (CMP) like defects, scratches, high costs, and water waste by enabling defect-free surfaces, higher chip yields, and sustainability through water recovery.[1][2][3][4] The company recently raised $18.7M in Series A funding led by M Ventures (Merck KGaA's VC arm), with Intel Capital and Tokyo Electron participating, to scale manufacturing, commercialize products, and expand for advanced nodes below 10nm.[1][2]
ChEmpower was founded by CEO and co-founder Dr. Sudhanshu Misra and CTO Prof. S.V. Babu, building on Misra's prior success in the CMP space. Misra previously founded NexPlanar in 2003, developing thermoplastic polyurethane CMP pads and slurries, which he sold to Cabot (now part of Entegris) for $142M in 2015—demonstrating deep expertise in polishing technologies.[2] The idea for ChEmpower emerged from advancing beyond abrasive-based methods, focusing on chemically reactive pads that integrate seamlessly into existing CMP tools while eliminating particles for superior results. Early traction includes demonstrations of abrasive-free 300mm copper technology, a pilot pad production line, and strategic partnerships with top semiconductor firms.[1][3]
ChEmpower rides the wave of advanced semiconductor scaling for AI, quantum devices, and high-performance computing, where sub-10nm nodes demand ultra-low defects amid exploding chip demand from new fabs.[1][2] Timing is ideal as CMP—a $3.5B market—evolves slowly but faces pressure for efficiency in leading-edge facilities open to innovations that cut costs and boost yields, especially with qualified processes limiting rapid shifts.[2] Favorable forces include sustainability mandates, water scarcity in fabs, and partnerships with giants like Intel and Tokyo Electron, positioning ChEmpower to influence ecosystem-wide adoption of greener, higher-yield planarization for next-gen chips.[1][2]
ChEmpower is primed to disrupt CMP by proving real-world wins in cost, defects, and sustainability at scale, leveraging its $18.7M to ramp pilot lines into commercial fabs. Upcoming trends like AI-driven chip complexity and eco-regulations will amplify demand for its platform, potentially expanding to packaging and quantum apps. Its influence could grow by setting new yield standards, much like Misra's prior exit, evolving from niche innovator to essential supplier in global semiconductor supply chains—empowering the defect-free chips fueling tomorrow's tech revolution.[1][2][3]
ChEmpower has raised $19.0M across 1 funding round. Most recently, it raised $19.0M Series A in April 2025.
| Date | Round | Lead Investors | Other Investors | Status |
|---|---|---|---|---|
| Apr 1, 2025 | $19M Series A | M Ventures, Rhapsody Venture Partners | EQT Ventures, Samsung Ventures, Sorenson Ventures | Announced |
ChEmpower has raised $19.0M in total across 1 funding round.
ChEmpower's investors include M Ventures (Merck), Rhapsody Venture Partners, EQT Ventures, Samsung Ventures, Sorenson Ventures.